S. Ueda

An experimental study of a magnetic sensor in an automated highway system

A. Asaoka, S. Ueda, 1996, Proceedings of Conference on Intelligent Vehicles.

Advanced COPNA-resin as a low temperature curing resin for high-density electronic packages

K. Nawa, S. Ueda, H. Watanabe, 1996 .

Single crystal silicon cantilever-based RF-MEMS switches using surface processing on SOI

S. Ueda, T. Nakatani, A.T. Nguyen, 2005, 18th IEEE International Conference on Micro Electro Mechanical Systems, 2005. MEMS 2005..

A 2-axis comb-driven micromirror array for 3D MEMS switches

S. Ueda, O. Tsuboi, H. Soneda, 2002, IEEE/LEOS International Conference on Optical MEMs.

A multi-chip directly mounted 512 MEMS mirror array module with hermetically sealed package for large optical cross-connects

Hisao Okuda, Yoshihiro Mizuno, Ippei Sawaki, 2005 .

Fishbone-shaped vertical comb actuator for dual-axis 1D analog micromirror array

S. Ueda, O. Tsuboi, H. Soneda, 2005, The 13th International Conference on Solid-State Sensors, Actuators and Microsystems, 2005. Digest of Technical Papers. TRANSDUCERS '05..

A rotational comb-driven micromirror with a large deflection angle and low drive voltage

S. Ueda, O. Tsuboi, H. Soneda, 2002, Technical Digest. MEMS 2002 IEEE International Conference. Fifteenth IEEE International Conference on Micro Electro Mechanical Systems (Cat. No.02CH37266).

A highly reliable single-crystal silicon RF-MEMS switch using Au sub-micron particles for wafer level LTCC cap packaging

S. Ueda, O. Toyoda, F. Nakazawa, 2012, 2012 2nd IEEE CPMT Symposium Japan.

A full-time accelerated vertical comb-driven micromirror for high speed 30-degree scanning

S. Ueda, O. Tsuboi, H. Soneda, 2004, 17th IEEE International Conference on Micro Electro Mechanical Systems. Maastricht MEMS 2004 Technical Digest.