L. C. Shao

Nonlinearity in micromechanical free–free beam resonators: modeling and experimental verification

Woei Wan Tan, Moorthi Palaniapan, L. C. Shao, 2008 .

Micromechanical resonators with submicron capacitive gaps in 2 μm process

Woei Wan Tan, L. C. Shao, M. Palaniapan, 2007 .

Study of the nonlinearities in micromechanical clamped–clamped beam resonators using stroboscopic SEM

L. C. Shao, Moorthi Palaniapan, C.-L. Wong, 2008 .

Effect of etch holes on quality factor of bulk-mode micromechanical resonators

L. C. Shao, Moorthi Palaniapan, L. Shao, 2008 .