Roland Telfeyan

Demonstration of a Process-Independent Run-to-Run Controller

James Moyne, John Taylor, Roland Telfeyan, 1995 .

A process-independent run-to-run controller and its application to chemical-mechanical planarization

James Moyne, Roland Telfeyan, J. Taylor, 1995, Proceedings of SEMI Advanced Semiconductor Manufacturing Conference and Workshop.

Run by run control of chemical-mechanical polishing

James Moyne, Duane S. Boning, Roland Telfeyan, 1996 .

A multilevel approach to the control of a chemical-mechanical planarization process

James Moyne, Duane S. Boning, John Taylor, 1996 .