Stephen C. Johnson

Direct imprinting of dielectric materials for dual damascene processing

David Wang, Michael D. Stewart, C. G. Willson, 2005, SPIE Advanced Lithography.

New methods for fabricating step and flash imprint lithography templates

William J. Dauksher, Kevin J. Nordquist, Eric S. Ainley, 2002, Workshop on Nanostructure Science, Metrology, and Technology.

High-resolution templates for step and flash imprint lithography

William J. Dauksher, Kevin J. Nordquist, Eric S. Ainley, 2002, SPIE Advanced Lithography.

Design of orientation stages for step and flash imprint lithography

Matthew E. Colburn, C. G. Wilson, Stephen C. Johnson, 2001 .

Step and flash imprint lithography: a new approach to high-resolution patterning

Bernard Choi, S. V. Sreenivasan, Todd C. Bailey, 1999, Advanced Lithography.

Imprint lithography: lab curiosity or the real NGL

William J. Dauksher, Todd C. Bailey, C. Grant Willson, 2003, SPIE Advanced Lithography.

Mesoscale modeling for SFIL simulating polymerization kinetics and densification

Yi Wei, William J. Dauksher, Kevin J. Nordquist, 2004, SPIE Advanced Lithography.