Gerd Ballhorn

Advanced and Highly Reliable Distributed Computing in a Fully Automated Environment

Gerd Ballhorn, Martin Bloecker, Danny Keogan, 2002, Photomask Technology.

Slashing turnaround-time by introducing distributed computing

Gerd Ballhorn, 2002, SPIE Photomask Technology.

Compensation of long-range process effects on photomasks by design data correction

Jens Schneider, Gerd Ballhorn, Martin Bloecker, 2002, Photomask Technology.

Design flow automation for variable-shaped beam pattern generators

Gerd Ballhorn, Martin Bloecker, 2002, Photomask Japan.

Compensation of long-range process effects on photomasks by design data correction

Gerd Ballhorn, Martin Bloecker, Danny Keogan, 2003, European Mask and Lithography Conference.

Mask manufacturing rule check: how to save money in your mask shop

Wolfram Ziegler, Gerd Ballhorn, Joerg Thiele, 2001, SPIE Photomask Technology.