A. A. Mihal'chuk

Compact recycled beam source for XRL and EUVL exposure tools

R. M. Silzer, J. Theodore Cremer, Melvin A. Piestrup, 1998, Advanced Lithography.

X-ray production simulation of an electron beam recycled through a betatron's internal target

A. A. Mihal'chuk, M. Piestrup, S. Uglov, 1998 .