Hermann Gross

发表

Comparison of CD measurements of an EUV photomask by EUV scatterometry and CD-AFM

Gaoliang Dai, Frank Scholze, Victor Soltwisch, 2013, Photomask Technology.

The statistical inverse problem of scatterometry: Bayesian inference and the effect of different priors

Hermann Gross, Sebastian Heidenreich, Matthias Wurm, 2015, Optical Metrology.

Detection and feature extraction of bridges in airborne and spaceborne SAR image data

Uwe Soergel, Hermann Gross, Antje Thiele, 2007, SPIE Remote Sensing.

Geometry reconstruction for scatterometry on a MoSi photo mask based on maximum likelihood estimation

Hermann Gross, Matthias Wurm, Bernd Bodermann, 2011, Optical Metrology.

Versatile DUV scatterometer of the PTB and FEM based analysis for mask metrology

A. Rathsfeld, Hermann Gross, Matthias Wurm, 2008, SPIE Advanced Lithography.

Feature extraction of bridges for change detection in high resolution SAR data

Uwe Soergel, Hermann Gross, Antje Thiele, 2008, Remote Sensing.

Alternative methods for uncertainty evaluation in EUV scatterometry

Hermann Gross, Sebastian Heidenreich, Bernd Bodermann, 2013, Optical Metrology.

First steps towards a scatterometry reference standard

Hermann Gross, Bernd Bodermann, Markus Bär, 2012, Other Conferences.

Three-dimensional visualization of buildings for urban warfare

Hermann Gross, Ulrich Thoennessen, 2003, SPIE Defense + Commercial Sensing.

On Applications of Sequential Multi-view Dense Reconstruction from Aerial Images

Hermann Gross, Dimitri Bulatov, Peter Wernerus, 2012, ICPRAM.

Unlocking device for freeing a guided stem supporting a headrest

Hermann Gross, Herbert Rapp, Manfred Weinich, 1985 .

Tuning on the fly of structural image analysis algorithms using data mining

Rudolf Kruse, Hermann Gross, Ulrich Thoennessen, 2000, SPIE Defense + Commercial Sensing.

GENERIC SYSTEM DESIGN FOR MEASUREMENT DATABASES – APPLIED TO CALIBRATIONS IN VACUUM METROLOGY, BIO-SIGNALS AND A TEMPLATE SYSTEM

Hermann Gross, Volker Hartmann, Gert Lindner, 2006 .

STOCHASTIC MODELING ASPECTS FOR AN IMPROVED SOLUTION OF THE INVERSE PROBLEM IN SCATTEROMETRY

A. Rathsfeld, Hermann Gross, Markus Bär, 2012 .

Evaluation of measurement uncertainties in EUV scatterometry

A. Rathsfeld, Hermann Gross, Markus Bär, 2009, Optical Metrology.

EXTRACTION OF LINES FROM LASER POINT CLOUDS

Hermann Gross, Ulrich Thoennessen, 2006 .

Optimal sets of measurement data for profile reconstruction in scatterometry

A. Rathsfeld, Hermann Gross, Markus Bär, 2007, SPIE Optical Metrology.

Computational methods estimating uncertainties for profile reconstruction in scatterometry

A. Rathsfeld, Hermann Gross, Markus Bär, 2008, SPIE Photonics Europe.

Mathematical modelling of indirect measurements in scatterometry

A. Rathsfeld, Hermann Gross, Bernd Bodermann, 2006 .

Investigations on surface reflection models for intensity normalization in airborne laser scanning (ALS) data

Boris Jutzi, Hermann Gross, B. Jutzi, 2010 .

BAYESIAN APPROACH TO THE STATISTICAL INVERSE PROBLEM OF SCATTEROMETRY: COMPARISON OF THREE SURROGATE MODELS

Hermann Gross, Markus Bär, Sebastian Heidenreich, 2015 .

FEATURE EXTRACTION AND CHANGE DETECTION FOR BRIDGES OVER WATER IN AIRBORNE AND SPACEBORNE SAR IMAGE DATA

Uwe Soergel, Karsten Schulz, Hermann Gross, 2008 .

A surrogate model enables a Bayesian approach to the inverse problem of scatterometry

Clemens Elster, Hermann Gross, Markus Bär, 2014 .

A scatterometry inverse problem in optical mask metrology

A. Rathsfeld, Hermann Gross, Bernd Bodermann, 2008 .

Bayesian approach to determine critical dimensions from scatterometric measurements

Hermann Gross, Markus Bär, Sebastian Heidenreich, 2018, Metrologia.

Profile reconstruction in extreme ultraviolet (EUV) scatterometry: modeling and uncertainty estimates

A. Rathsfeld, Frank Scholze, Hermann Gross, 2009 .

Modelling line edge roughness in periodic line-space structures by Fourier optics to improve scatterometry

Gaoliang Dai, Frank Scholze, Mark-Alexander Henn, 2014 .

Measurements of CD and sidewall profile of EUV photomask structures using CD-AFM and tilting-AFM

Gaoliang Dai, Frank Scholze, Mark-Alexander Henn, 2014 .

LINE-BASED REGISTRATION OF TERRESTRIAL AND AIRBORNE LIDAR DATA

Hermann Gross, Ulrich Thoennessen, Wolfgang von Hansen, 2008 .

Improved grating reconstruction by determination of line roughness in extreme ultraviolet scatterometry.

Frank Scholze, Mark-Alexander Henn, Hermann Gross, 2012, Optics letters.

Uncertainty propagation in computationally expensive models: A survey of sampling methods and application to scatterometry

Hermann Gross, Markus Bär, Sebastian Heidenreich, 2017 .

A maximum likelihood approach to the inverse problem of scatterometry.

Clemens Elster, Frank Scholze, Mark-Alexander Henn, 2012, Optics express.

Improved reconstruction of critical dimensions in extreme ultraviolet scatterometry by modeling systematic errors

Clemens Elster, Frank Scholze, Mark-Alexander Henn, 2014 .

SEGMENTATION OF INTERFEROMETRIC SAR DATA FOR BUILDING DETECTION

Uwe Soergel, Uwe Stilla, Hermann Gross, 2000 .