Yuzuri Yasuda

发表

Properties of EUV and particle generations from laser-irradiated solid- and low-density tin targets

Hiroyuki Furukawa, Noriaki Miyanaga, Hiroaki Nishimura, 2005, SPIE Advanced Lithography.

Energy spectra and charge states of debris emitted from laser-produced minimum mass tin plasmas

Kunioki Mima, Hiroyuki Furukawa, Noriaki Miyanaga, 2006, SPIE Advanced Lithography.

Spectroscopic study of debris mitigation with minimum-mass sn laser plasma for extreme ultraviolet lithography

Kunioki Mima, Noriaki Miyanaga, Hiroaki Nishimura, 2006 .

Optimum laser pulse duration for efficient extreme ultraviolet light generation from laser-produced tin plasmas

Kunioki Mima, Noriaki Miyanaga, Hiroaki Nishimura, 2006 .

Tin-Polymer Composite on a Rotating Drum as a High Repetition Rate Laser Target for Extreme Ultraviolet Generation

Hiroaki Nishimura, Shinsuke Fujioka, Keiji Nagai, 2006 .

Neutral Debris Mitigation in Laser Produced Extreme Ultraviolet Light Source by the Use of Minimum-Mass Tin Target

Kunioki Mima, Noriaki Miyanaga, Hiroaki Nishimura, 2008 .

Extreme ultraviolet emission from laser-irradiated low-density Xe targets

Kunioki Mima, Noriaki Miyanaga, Hiroaki Nishimura, 2006 .

Angular distribution control of extreme ultraviolet radiation from laser-produced plasma by manipulating the nanostructure of low-density SnO2 targets

Noriaki Miyanaga, Hiroaki Nishimura, Shinsuke Fujioka, 2006 .

Absolute evaluation of out-of-band radiation from laser-produced tin plasmas for extreme ultraviolet lithography

Kunioki Mima, Noriaki Miyanaga, Hiroaki Nishimura, 2008 .

Characterization of out-of-band radiation and plasma parameters in laser-produced Sn plasmas for extreme ultraviolet lithography light sources

Hiroaki Nishimura, Keiji Nagai, Ken Takiyama, 2008 .