Dinesh Koli

The Role of Polysilicon Slurry and Its Application in 7nm CMP

Ji Chul Yang, Haigou Huang, Tai Fong Chao, 2017 .

CMP: Consideration of Stop-on Selectivity in Advanced Node Semiconductor Manufacturing Technology

Haigou Huang, Cathy Labelle, Dinesh Koli, 2017 .

Damascene Copper Plating Recipe Engineering for Defectivity, Health of Line (HOL) and Reliability Improvement

Qiang Huang, Shafaat Ahmed, Paul Findeis, 2016 .