Monique Dilhan

Comparisons of the new thick negative resist to Su8 resist

Ayad Ghannam, David Bourrier, Hugues Granier, 2011, Advanced Lithography.

Experimentation of electrostatically actuated monochip micropump for drug delivery

Daniel Esteve, Henri Camon, Pierre Temple-Boyer, 1999, Design, Test, Integration, and Packaging of MEMS/MOEMS.

Micro-interconnection technology suitable for RF-NEMS varactors elaboration

David Dubuc, Katia Grenier, Monique Dilhan, 2008, NanoScience + Engineering.

Characterisation of P floating islands for 150-200 V FLYMOSFETs

Gérard Sarrabayrouse, Yann Weber, Jean-Michel Reynes, 2007, IET Circuits Devices Syst..

Fabrication of integrated inductors on silicon for fully integrated DC-DC microconverters

Yves Lembeye, Jean-Louis Sanchez, David Bourrier, 2003, SPIE MOEMS-MEMS.

A method of manufacturing an integrated circuit

Thierry Parra, Christophe Viallon, Ayad Ghannam, 2010 .

Directed Assembly of Nanowires using Silicon Grooves and Localized Surface Treatments

Christian Bergaud, David Bourrier, Monique Dilhan, 2008 .

Potential of BPN as a new negative photoresist for a very thick layer with high aspect ratio

Ayad Ghannam, David Bourrier, Monique Dilhan, 2014 .