Steven T. Patton

Failure mechanisms of DC and capacitive RF MEMS switches

Steven T. Patton, Jeffrey S. Zabinski, 2006, SPIE MOEMS-MEMS.

Effect of Space Radiation on the Leakage Current of MEMS Insulators

John G. Jones, Richard A. Vaia, Albert J. Frasca, 2013, IEEE Transactions on Nuclear Science.

Lubrication of Microelectromechanical Systems (MEMS) Using Bound and Mobile Phases of Fomblin Zdol®

Steven T. Patton, Jeffrey S. Zabinski, K. C. Eapen, 2002 .

Performance and reliability of a new MEMS electrostatic lateral output motor

W. D. Cowan, Steven T. Patton, Jeffrey S. Zabinski, 1999, 1999 IEEE International Reliability Physics Symposium Proceedings. 37th Annual (Cat. No.99CH36296).

Effects of dielectric charging on fundamental forces and reliability in capacitive microelectromechanical systems radio frequency switch contacts

Steven T. Patton, Jeffrey S. Zabinski, 2006 .

Effect of surface chemistry on the tribological performance of a MEMS electrostatic lateral output motor

William D. Cowan, Steven T. Patton, Jeffrey S. Zabinski, 2001 .

Performance results of MEMS coated with a conformal DLC

Steven T. Patton, Jeffrey S. Zabinski, Steven A. Smallwood, 2006 .

Failure mechanisms of a MEMS actuator in very high vacuum

Steven T. Patton, Jeffrey S. Zabinski, J. Zabinski, 2002 .

Failure Mechanisms of Capacitive MEMS RF Switch Contacts

Steven T. Patton, Jeffrey S. Zabinski, 2005 .