C. Monget
发表
V. Arnal,
D. Reber,
A. Farcy,
2005,
IEEE InternationalElectron Devices Meeting, 2005. IEDM Technical Digest..
D. Reber,
A. Farcy,
C. Cregut,
2004,
IEDM Technical Digest. IEEE International Electron Devices Meeting, 2004..
Will Conley,
Jean-Damien Chapon,
Jerome Belledent,
2006,
SPIE Advanced Lithography.
J. Hazart,
Alain Ostrovsky,
Patricia Pimenta Barros,
2016
.
J. Mazurier,
O. Faynot,
A. Pofelski,
2014,
2014 Symposium on VLSI Technology (VLSI-Technology): Digest of Technical Papers.
Yuji Tanaka,
Masahiko Harumoto,
Harold Stokes,
2016,
SPIE Advanced Lithography.
F. Volpi,
C. Monget,
M. Vilmay,
2009,
2009 IEEE International Reliability Physics Symposium.
R. Ranica,
O. Callen,
M. Haond,
2006,
2006 International Electron Devices Meeting.
F. Volpi,
C. Monget,
M. Vilmay,
2008,
IEEE Transactions on Device and Materials Reliability.
B. Mortini,
S. Bos-Lorenzo,
C. Monget,
2003
.
M. Broekaart,
Vincent Arnal,
Maurice Rivoire,
2003
.
L. Arnaud,
S. Chhun,
C. Besset,
2009,
2009 IEEE International Interconnect Technology Conference.
Manufacturability and Speed Performance Demonstration of Porous ULK (k=2.5) for a 45nm CMOS Platform
M. Haond,
P. Ferreira,
C. Cregut,
2007,
2007 IEEE Symposium on VLSI Technology.