Jay S. Jun

Evaluation of New In-Chip and Arrayed Line Overlay | NIST

Mark P. Davidson, Richard M. Silver, Robert D. Larrabee, 2004 .

New Method to Enhance Overlay Tool Performance | NIST

Egon Marx, Mark P. Davidson, Richard M. Silver, 2003 .

Overlay Metrology: Recent Advances and Future Solutions | NIST

Edward Kornegay, Jay S. Jun, Richard M. Silver, 2001 .

The Limits of Image-Based Optical Metrology | NIST

Bryan M. Barnes, Ronald G. Dixson, Richard M. Silver, 2006 .

Calibrated Overlay Wafer Standard | NIST

Richard M. Silver, Michael T. Stocker, Ravikiran Attota, 2007 .

Grating pitch measurements with the molecular measuring machine

John S. Villarrubia, E C. Teague, John A. Kramar, 1999, Optics & Photonics.