Y. Ikuta

Inspection and planarization of programmed pit masks for EUV lithography

Andy Ma, Soon-Cheon Seo, S.-I. Han, 2005, SPIE Photomask Technology.

Vanadium dioxide thin films prepared by chemical vapour deposition from vanadium(III) acetylacetonate

Y. Ikuta, Y. Ikuta, T. Maruyama, 1993, Journal of Materials Science.