Hitoshi Morinaga

A Model for the Electrochemical Deposition and Removal of Metallic Impurities on Si Surfaces (Special Issue on Scientific ULSI Manufacturing Technology)

Tadahiro Ohmi, Hitoshi Morinaga, Makoto Suyama, 1996 .

Mechanism of Metallic Particle Growth and Metal‐Induced Pitting on Si Wafer Surface in Wet Chemical Processing

Tadahiro Ohmi, Hitoshi Morinaga, T. Ohmi, 1994 .