Els Van Besien

Reliability challenges for barrier/liner system in high aspect ratio through silicon vias

Eric Beyne, Ingrid De Wolf, Chen Wu, 2014, Microelectron. Reliab..

Influence of porosity on electrical properties of low-k dielectrics

David De Roest, Larry Zhao, Gerald Beyer, 2012 .

Study of metal barrier deposition-induced damage to porous low-k materials

Christopher J. Wilson, Cor Claeys, Larry Zhao, 2011 .

Accelerated Publication: Effect of porogen residue on electrical characteristics of ultra low-k materials

Larry Zhao, Marianna Pantouvaki, Els Van Besien, 2011 .

Hydrogen outgassing induced liner/barrier reliability degradation in through silicon via's

Eric Beyne, Ingrid De Wolf, Stefaan Van Huylenbroeck, 2014 .