Lisa R. Rich

Semirigid mirrors with sparse actuators: thermal and structural performance capabilities

Gary Matthews, Lisa R. Rich, Calvin E. Abplanalp, 2001, SPIE Optics East.

Polishing process for concave lightweight silicon-coated silicon carbide optics

Lisa R. Rich, David Arthur Crowe, 1995, Optics & Photonics.

Contamination and degradation of 157-nm stepper optical components: field experience at International SEMATECH

Lisa R. Rich, Jeff Meute, Julian S. Cashmore, 2002, SPIE Advanced Lithography.

157-nm system test for high-NA lithographic lens systems

Lisa R. Rich, Paul G. Dewa, Horst Schreiber, 2002, SPIE Advanced Lithography.

Characterizing the polarization dependence of system-wavefronts at 157nm induced by intrinsically birefringent material

Lisa R. Rich, Horst Schreiber, Paul G. Dewa, 2002 .