D. Y. Mun

Application of review-SEM to high-resolution inspection for 3xnm nodes

Yongkyoo Choi, H. W. Yoo, J. H. Oh, 2012, Advanced Lithography.

CD-SEM and e-beam defect inspection of high-aspect ratio contact holes: measurement and simulation of precharge

S. Babin, J. H. Oh, D. Y. Mun, 2012, Advanced Lithography.

Interval Scan Inspection Technique for Contact Failure of Advanced DRAM Process using Electron Beam-Inspection System

Mari Nozoe, D. Y. Mun, J. H. Oh, 2012 .