A. Kodama

Foreseeing and active-suppression of anomalous discharge in plasma processing equipment by in-situ monitoring of plasma state using viewing port probe

K. Okamura, R. Miyagawa, M. Hagiwara, 2005, ISSM 2005, IEEE International Symposium on Semiconductor Manufacturing, 2005..

High-speed scaled-down self-aligned SEG SiGe HBTs

Katsuyoshi Washio, Hiromi Shimamoto, Makoto Miura, 2003 .

190-GHz f/sub T/, 130-GHz f/sub max/ SiGe HBTs with heavily doped base formed by HCl-free selective epitaxy

K. Washio, T. Hashimoto, A. Kodama, 2002, Proceedings of the Bipolar/BiCMOS Circuits and Technology Meeting.

A variable inductor using mutual-current control and application to a SiGe 4.5-GHz VCO for wide tuning range

T. Nakamura, T. Masuda, K. Washio, 2005, 2005 Asia-Pacific Microwave Conference Proceedings.