Yasushi Mizuno

Integrated projecting optics tester for inspection of immersion ArF scanner

Toru Fujii, Kosuke Suzuki, Naonori Kita, 2006, SPIE Advanced Lithography.

On board polarization measuring instrument for high NA excimer scanner

Toru Fujii, Naonori Kita, Yasushi Mizuno, 2005, SPIE Advanced Lithography.

Polarization properties of state-of-art lithography optics represented by first canonical coordinate of Lie group

Yasuhiro Ohmura, Kosuke Suzuki, Jun Kogo, 2007, SPIE Advanced Lithography.