Donald R. Hush

Wafer examination and critical dimension estimation using scattered light

S. Sohail H. Naqvi, John R. McNeil, Richard H. Krukar, 1992, Electronic Imaging.

Analyzing simulated and measured optical scatter for semiconductor process verification

S. Sohail H. Naqvi, John R. McNeil, Richard H. Krukar, 1993, Electronic Imaging.