J. Zekry

MEMS packaging and reliability: An undividable couple

Bart Vandevelde, Ingrid De Wolf, Ann Witvrouw, 2012, Microelectron. Reliab..

Wafer-level thin film vacuum packages for MEMS using nanoporous anodic alumina membranes

C. Van Hoof, R. Puers, J. Zekry, 2011, 2011 16th International Solid-State Sensors, Actuators and Microsystems Conference.