Alexey Shaporin

Dynamic parameter identification techniques and test structures for microsystems characterization on wafer level

Alexey Shaporin, A. Shaporin, 2009 .

2D Scanning Micromirror with Large Scan Angle and Monolithically Integrated Angle Sensors Based on Piezoelectric Thin Film Aluminum Nitride

Karla Hiller, Roman Forke, Thomas Otto, 2020, Sensors.

New parametric variational techniques for MEMS simulation based on finite element method

Jan Mehner, Wolfram Dötzel, Thomas Geßner, 2010 .

Reliability of MEMS devices in shock and vibration overload situations

Karla Hiller, Steffen Kurth, Christian Kaufmann, 2008, SPIE MOEMS-MEMS.

Erfassung von Standardgeometrieelementen im Mikrometerbereich: Herausforderungen und Lösungsansätze (Characterization of Standard-Geometry Micro Structures: Chances and Challenges)

Jürgen Fleischer, Gert Goch, Jochen Peters, 2008 .

Design methodology and results evaluation of a heating functionality in modular lab-on-chip systems

Thomas Otto, Petra Streit, Joerg Nestler, 2018 .

Novel test structures for characterization of microsystems parameters at wafer level

Jan Mehner, Petra Streit, Wolfram Dötzel, 2009, MOEMS-MEMS.

Design, technology, numerical simulation and optimization of building blocks of a micro and nano scale tensile testing platform with focus on a piezoresistive force sensor

Karla Hiller, Jan Mehner, Bernhard Wunderle, 2014, 2014 15th International Conference on Thermal, Mechanical and Mulit-Physics Simulation and Experiments in Microelectronics and Microsystems (EuroSimE).

Numerical characterization and experimental verification of an in-plane MEMS-actuator with thin-film aluminum heater

Karla Hiller, Jan Mehner, Dietrich R. T. Zahn, 2014 .