Hideaki Abe

发表

Evaluation of CD-SEM measurement uncertainty using secondary electron simulation with charging effect

Hideaki Abe, Akira Hamaguchi, Yuichiro Yamazaki, 2007, SPIE Advanced Lithography.

Humidity Resistivity of Cavity Package Sealed with Epoxy Adhesive resin for Solid-Stage Imagers

Hideaki Abe, Toshio Nakano, Masahiko Kadowaki, 1988 .

Control method of wireless power transfer system for allowing coil position deviation

Hideaki Abe, Toshihiro Akiyama, Mamoru Ozaki, 2015, 2015 IEEE International Telecommunications Energy Conference (INTELEC).

Parallelizing with Limited Number of Ancillae

Hideaki Abe, Shao Chin Sung, 2000, UMC.

Parallelization of Restricted Quantum Circuits using Ancillae (Algebraic Systems, Formal Languages and Computations)

Hideaki Abe, Shao Chin Sung, 2000 .

Load Matching for Non-Contact Charging System

Hideaki Abe, Koosuke Harada, Hiroshi Sakamoto, 1999 .

Evaluation of producer's and consumer's risks in scatterometry and scanning electron microscopy metrology for inline critical dimension metrology

Hideaki Abe, Masafumi Asano, Toru Koike, 2006 .

A thin transformer realized by optimizing the resonance voltage of an active clamp soft-switching converter

Hideaki Abe, Teruhito Takeda, Takafumi Fujino, 2015, 2015 IEEE International Telecommunications Energy Conference (INTELEC).

In-line CD metrology with combined use of scatterometry and CD-SEM

Hideaki Abe, Masafumi Asano, Toru Koike, 2006, SPIE Advanced Lithography.

Load voltage stabilization of noncontact energy transfer using three resonant circuit

Hideaki Abe, Hiroshi Sakamoto, Koosuke Harada, 2002, Proceedings of the Power Conversion Conference-Osaka 2002 (Cat. No.02TH8579).

Error factor in bottom CD measurement for contact hole using CD-SEM

Hideaki Abe, Yuichiro Yamazaki, 2006, SPIE Advanced Lithography.

Hotspot monitoring system with contour-based metrology

Hideaki Abe, Yasushi Tanaka, Yuuichiro Yamazaki, 2009, Advanced Lithography.

CD-SEM tool stability and tool-to-tool matching management using image sharpness monitor

Hideaki Abe, Tatsuya Maeda, Daisuke Hibino, 2009, Advanced Lithography.

Simple Equivalent Circuit for a Wireless Power Transfer System Using a Repeating Coil and Effects Confirming the Simplification in the Output Voltage Estimation

Hideaki Abe, Toshihiro Akiyama, Mamoru Ozaki, 2015 .

Drive Control Development of Switched Reluctance Motor for Compact Electric Vehicles

Hideaki Abe, Hisashi Ogata, Hiroaki Okada, 2019 .

The measurement uncertainty of CD measurement in the optical measurement technology using Fourier image

Hideaki Abe, Yuichiro Yamazaki, Kuniharu Nagashima, 2014, Advanced Lithography.

Assessment of reliability impact on GHz processors with moderate overdrive

Hideaki Abe, Koji Shibutani, Hideki Aono, 2014, Fifteenth International Symposium on Quality Electronic Design.

Required metrology and inspection for nanoimprint lithography

Hideaki Abe, Masafumi Asano, Kazuto Matsuki, 2017, Advanced Lithography.

Sampling plan optimization for CD control in low k1 lithography

Hideaki Abe, Shoji Mimotogi, Masafumi Asano, 2005, SPIE Advanced Lithography.

Use of 3D metrology for process control

Hideaki Abe, Jo Finders, Toshiaki Fujii, 2009, Advanced Lithography.

Experiment and simulation of charging effects in SEM

Hideaki Abe, Akira Hamaguchi, S. Borisov, 2008, SPIE Advanced Lithography.

Verification metrology system by using inline reference metrology

Hideaki Abe, Akira Hamaguchi, Takahiro Ikeda, 2014 .

Investigation of factors causing difference between simulation and real SEM image

Hideaki Abe, Akira Hamaguchi, Sergey Babin, 2009, Advanced Lithography.

Novel prediction methodology for etched hole patterning failure

Hideaki Abe, Kohji Hashimoto, Shoji Mimotogi, 2012, Advanced Lithography.

Time dependence of SEM signal due to charging: measurements and simulation using Monte Carlo software

Hideaki Abe, Akira Hamaguchi, Sergey Babin, 2009, Advanced Lithography.

Scatterometry-based process control for nanoimprint lithography

Hideaki Abe, Masafumi Asano, Kazuto Matsuki, 2016, SPIE Advanced Lithography.

Parallelization of Quantum Circuits with Ancillae ( Special Issue on Selected Papers from LA Symposium)

Hideaki Abe, Shao Chin Sung, 2003 .

Verification metrology system by using inline reference metrology

Hideaki Abe, Akira Hamaguchi, Takahiro Ikeda, 2014, Advanced Lithography.

Measurement precision of CD-SEM for 65-nm technology node

Hideaki Abe, Yuichiro Yamazaki, Takahiro Ikeda, 2004, SPIE Advanced Lithography.

Metrology and inspection required for next generation lithography

Hideaki Abe, Masafumi Asano, Akiko Kawamoto, 2017 .

Mechanism of ArF resist-pattern shrinkage in critical-dimension scanning electron microscopy measurement

Hideaki Abe, Tsukasa Azuma, Hiroshi Motoki, 2004 .

Investigation of Scanning Electron Microscope Overlay Metrology

Hideaki Abe, Toru Koike, Fumio Komatsu, 1999 .