Igor V. Fomenkov
发表
Imtiaz Ahmad,
Igor V. Fomenkov,
Alex I. Ershov,
2011,
Advanced Lithography.
Hans Meiling,
Igor V. Fomenkov,
Wayne J. Dunstan,
2015,
Advanced Lithography.
Hans Meiling,
Igor V. Fomenkov,
Alex I. Ershov,
2014,
Advanced Lithography.
Igor V. Fomenkov,
David C. Brandt,
Jayson Stewart,
2020
.
Igor V. Fomenkov,
Alex I. Ershov,
David W. Myers,
2006,
SPIE Advanced Lithography.
Igor V. Fomenkov,
Georgiy O. Vaschenko,
Chirag Rajyaguru,
2018,
Photomask Technology.
Igor V. Fomenkov,
Shailendra N. Srivastava,
David C. Brandt,
2013,
Advanced Lithography.
Igor V. Fomenkov,
Alex I. Ershov,
William N. Partlo,
2009,
Advanced Lithography.
Imtiaz Ahmad,
Igor V. Fomenkov,
Alex I. Ershov,
2010,
Advanced Lithography.
Andreas Tünnermann,
Torsten Feigl,
Norbert Kaiser,
2013,
Advanced Lithography.
Bruno M. La Fontaine,
Imtiaz Ahmad,
Michael J. Lercel,
2012,
Advanced Lithography.
Igor V. Fomenkov,
William N. Partlo,
Palash P. Das,
1997,
International Symposium on High Power Laser Systems and Applications.
Imtiaz Ahmad,
Igor V. Fomenkov,
Alex I. Ershov,
2013,
Advanced Lithography.
Bruno M. La Fontaine,
Imtiaz Ahmad,
Michael J. Lercel,
2011,
Advanced Lithography.
Igor V. Fomenkov,
Oleh V. Khodykin,
Richard M. Ness,
2003,
SPIE Advanced Lithography.
Torsten Feigl,
Norbert Kaiser,
Igor V. Fomenkov,
2008,
Optical Engineering + Applications.
Hans Meiling,
Igor V. Fomenkov,
Alex I. Ershov,
2014,
Advanced Lithography.
Imtiaz Ahmad,
Igor V. Fomenkov,
Alex I. Ershov,
2009,
Advanced Lithography.
Igor V. Fomenkov,
Oleh V. Khodykin,
Richard M. Ness,
2004,
SPIE Advanced Lithography.
Michael J. Lercel,
Igor V. Fomenkov,
Alex I. Ershov,
2012,
Advanced Lithography.
Igor V. Fomenkov,
Alex I. Ershov,
William N. Partlo,
2008,
Lithography Asia.
Igor V. Fomenkov,
William N. Partlo,
David W. Myers,
2007,
SPIE Advanced Lithography.
Igor V. Fomenkov,
Alex I. Ershov,
William N. Partlo,
2006,
SPIE Advanced Lithography.
Igor V. Fomenkov,
Alex I. Ershov,
William N. Partlo,
2006,
SPIE Advanced Lithography.
Igor V. Fomenkov,
2019
.
Igor V. Fomenkov,
Alex I. Ershov,
David W. Myers,
2013,
Advanced Lithography.
Imtiaz Ahmad,
Igor V. Fomenkov,
Alex I. Ershov,
2010,
Advanced Lithography.
Industrialization of a robust EUV source for high-volume manufacturing and power scaling beyond 250W
Igor V. Fomenkov,
Alex I. Ershov,
Chirag Rajyaguru,
2018,
Advanced Lithography.
Igor V. Fomenkov,
Alex I. Ershov,
William N. Partlo,
2006,
SPIE Advanced Lithography.
Igor V. Fomenkov,
William N. Partlo,
Richard M. Ness,
2006
.
Igor V. Fomenkov,
David C. Brandt,
Matthew Graham,
2021,
International Conference on Extreme Ultraviolet Lithography 2021.
Igor V. Fomenkov,
William N. Partlo,
David W. Myers,
2009
.
Igor V. Fomenkov,
William N. Partlo,
Alexander N. Bykanov,
2009
.
Igor V. Fomenkov,
William N. Partlo,
Oleh V. Khodykin,
2004
.