Eiichi Yonezawa

PRINCIPLES AND FABRICATION PROCESS OF THE ACTUATOR

Haruo Nakazawa, Masaharu Edo, Yasumasa Watanabe, 1997 .

The two-dimensional micro conveyer: principles and fabrication process of the actuator

Haruo Nakazawa, Masaharu Edo, Yasumasa Watanabe, 1997, Proceedings of International Solid State Sensors and Actuators Conference (Transducers '97).

A new fabrication process of a planar coil using photosensitive polyimide and electroplating

Haruo Nakazawa, Masaharu Edo, Yasumasa Watanabe, 1996 .