John Quaedackers

Dense lines created by spacer DPT scheme: process control by local dose adjustment using advanced scanner control

Jo Finders, Timon Fliervoet, Mireille Maenhoudt, 2009, Advanced Lithography.

Pitch doubling through dual-patterning lithography challenges in integration and litho budgets

Patrick Jaenen, Jo Finders, Mireille Maenhoudt, 2007, SPIE Advanced Lithography.