Moonsuk Yi

At-wavelength inspection of defect smoothing in EUVL masks

Jeffrey Bokor, Moonsuk Yi, Min-Cheol Park, 2002, SPIE Advanced Lithography.

EUVL mask blank repair

Donald W. Sweeney, Anton Barty, Scott Daniel Hector, 2002, SPIE Advanced Lithography.

Actinic Mask Inspection at the ALS Initial Design Review

Donald W. Sweeney, Kenneth A. Goldberg, Anton Barty, 2003 .

Evaluation of the Capability of a Multibeam Confocal Inspection System for Inspection of EUVL Mask Blanks

Moonsuk Yi, Paul B. Mirkarimi, Cindy C. Larson, 2002, Photomask Technology.