Daniel Haefliger

SU-8 Cantilevers for Bio/chemical Sensing; Fabrication, Characterisation and Development of Novel Read-out Methods

Anja Boisen, Alicia Johansson, Maria Nordström, 2008, Sensors.

Optimized plasma-deposited fluorocarbon coating for dry release and passivation of thin SU-8 cantilevers

Anja Boisen, Stephan Sylvest Keller, Daniel Haefliger, 2007 .

Three-dimensional microfabrication in negative resist using printed masks

Anja Boisen, Daniel Haefliger, A. Boisen, 2006 .

Self‐Positioning of Polymer Membranes Driven by Thermomechanically Induced Plastic Deformation

Anja Boisen, Ole Hansen, Daniel Haefliger, 2006 .