Michael Liehr

发表

Experimental characterization of coaxial through silicon vias for 3D integration

Stephen Adamshick, Douglas Coolbaugh, Michael Liehr, 2015, Microelectron. J..

High Frequency Electrical Characterization of 3D Signal/Ground through Silicon Vias

Michael Liehr, Seth Kruger, John Burke, 2014 .

Feasibility of coaxial through silicon via 3D integration

Michael Liehr, Douglas D. Coolbaugh, S. Adamshick, 2013 .

In-situ characterization of SiO2 deposition and growth for gate-oxides

Michael Liehr, 1992, Other Conferences.

Ultraclean semiconductor processing technology and surface chemical cleaning and passivation : Symposum held April 17-19, 1995, San Francisco, California, USA

Michael Liehr, 1995 .

AIM Photonics - Manufacturing Challenges for Photonic Integrated Circuits

Michael Liehr, 2016 .

Powering the 21st century with integrated photonics

Michael Liehr, 2021, Photonics for Quantum Workshop 2019.

Physically unclonable cryptographic primitives using self-assembled carbon nanotubes.

Michael Liehr, Jianshi Tang, Hongsik Park, 2016, Nature nanotechnology.

Surface etching and roughening in integrated processing of thermal oxides

Michael Liehr, Gary W. Rubloff, M. Offenberg, 1991 .

Semiconductor research and development options for rapid commercialization

Michael Liehr, 2010 .

Kinetics of silicon epitaxy using SiH4 in a rapid thermal chemical vapor deposition reactor

Michael Liehr, M. Offenberg, M. Offenberg, 1990 .

Stacking‐fault‐induced defect creation in SiO2 on Si(100)

Michael Liehr, J. E. Lewis, G. B. Bronner, 1988 .

Ultraclean, integrated processing of thermal oxide structures

Michael Liehr, Gary W. Rubloff, Karen Holloway, 1990 .

Growth and characterization of nanodiamond layers prepared using the plasma-enhanced linear antennas microwave CVD system

Michael Liehr, Milos Nesladek, Ladislav Fekete, 2010 .

Kinetics of high-temperature thermal decomposition of SiO2 on Si(100)

Michael Liehr, Gary W. Rubloff, J. E. Lewis, 1987 .

Integrated processing of MOS gate dielectric structures

Michael Liehr, Gary W. Rubloff, M. Offenberg, 1994 .

Enabling EUV Materials Introduction: An Evolutionary Process

Michael Liehr, Michael Tittnich, Warren Monttomery, 2011 .