Koichi Wakamoto

Application of optical CD metrology for alternative lithography

Masafumi Asano, Akiko Kawamoto, Kazuto Matsuki, 2013, Advanced Lithography.

Application of advanced hybrid metrology method to nanoimprint lithography

Masafumi Asano, Matthew Sendelbach, Koichi Wakamoto, 2017, Advanced Lithography.

Impact of shrinking measurement error budgets on qualification metrology sampling and cost

Masafumi Asano, Alok Vaid, Chas Archie, 2014, Advanced Lithography.

Effect of measurement error budgets and hybrid metrology on qualification metrology sampling

Masafumi Asano, Chas Archie, Carmen Osorio, 2014 .

Hybrid approach to optical CD metrology of directed self-assembly lithography

Masafumi Asano, Akiko Kawamoto, Cornel Bozdog, 2013, Advanced Lithography.