Fumiko Yano

Current Status and Future Trend of Analytical Instruments for Failure Analyses in Si Process

Takashi Aoyama, Yasuhiro Mitsui, Hiroshi Kakibayashi, 1999 .

Developments of new concept analytical instruments for failure analyses of sub-100 nm devices

Takashi Aoyama, Yasuhiro Mitsui, Hiroshi Kakibayashi, 2001, Microelectron. Reliab..

Origin of characteristic variability in metal-oxide-semiconductor field-effect transistors revealed by three-dimensional atom imaging

Tohru Mogami, Akio Nishida, Yasuyoshi Nagai, 2011 .

Deconvolution of scanning electron microscopy images

Fumiko Yano, F. Yano, Setsuo Nomura, 1993 .

X‐ray photoelectron spectroscopy study on native oxidation of As‐implanted Si (100)

Yasuhiro Mitsui, Fumiko Yano, Toshihiko Itoga, 1996 .