Shin-ichi Imai

Advanced Semiconductor Manufacturing Using Big Data

Satoshi Yasuda, Tomoya Tanaka, Shinji Inoue, 2015, IEEE Transactions on Semiconductor Manufacturing.

Interconnection failure caused by bath degradation in copper electroplating and its VM-FDC using mathematical model

Shin-ichi Imai, Masaki Kitabata, T. Tanaka, 2009, 2009 IEEE/SEMI Advanced Semiconductor Manufacturing Conference.

Unstructured data treatment for big data solutions

Shintaro Sato, Akihiro Kayahara, Shin-ichi Imai, 2016, 2016 International Symposium on Semiconductor Manufacturing (ISSM).