Hirokimi Shirasaki

发表

Arbitrary 3D linewidth form measurement simulations for the next-generation semiconductor circuits by scatterometry using the FDTD method

Hirokimi Shirasaki, 2004, SPIE Advanced Lithography.

Isolation mounts scatterometry with RCWA and PML

Hirokimi Shirasaki, 2014, Advanced Lithography.

Steps Approximate Analysis of Linear and Raised Cosine Tapered Microstrip Lines by Waveguide Model

Hirokimi Shirasaki, 1996 .

3D isolation mounts scatterometry with RCWA and PML

Hirokimi Shirasaki, 2015, Advanced Lithography.

Linewidth measurement simulations for semiconductor circuits by scatterometry using FDTD and time shortening calculation method

Hirokimi Shirasaki, Kunio Ueta, 2004, SPIE Advanced Lithography.

Resist and silicon trench array line width measurement simulations for the next-generation semiconductor circuits by optical scattering properties using the FDTD method

Hirokimi Shirasaki, Kunio Ueta, Noriyuki Kondou, 2003, SPIE Advanced Lithography.

3D isolated and periodic grooves measurement simulations for semiconductor circuits by scatterometry using the FDTD methods and the time shortening calculation method

Hirokimi Shirasaki, 2006, SPIE Advanced Lithography.

3D anisotropic semiconductor grooves measurement simulations (scatterometry) using FDTD methods

Hirokimi Shirasaki, H. Shirasaki, 2007, SPIE Advanced Lithography.

3D semiconductor grooves measurement simulations (scatterometry) using nonstandard FDTD methods

Hirokimi Shirasaki, 2008, SPIE Advanced Lithography.

WAVEGUIDE MODEL ANALYSYS AND DESIGN CHARTS OF RAISED COSINE TAPERED MICROSTRIP LINES.

Hirokimi Shirasaki, 1998 .

Shape measurement simulation for the silicon trench array by scattering properties and continuous wavelet analysis with interference spectroscopy

Hirokimi Shirasaki, 2002, SPIE Advanced Lithography.

Scatterometry simulator for multicore CPU

Hirokimi Shirasaki, 2010, Advanced Lithography.

Scatterometry simulator using GPU and evolutionary algorithm

Hirokimi Shirasaki, 2011, Advanced Lithography.

Scatterometry simulator development with GPU, real-coded GA and RCWA

Hirokimi Shirasaki, 2013, Advanced Lithography.

Arbitrary cross sections and stack forms measurement simulations for the semiconductor circuits by scatterometry

Hirokimi Shirasaki, H. Shirasaki, 2005, SPIE Advanced Lithography.

DESIGN CHARTS BY WAVEGUIDE MODEL ANALYSIS OF KLOPFENSTEIN AND HECKEN TYPE MICROSTRIP LINE TAPERS.

Hirokimi Shirasaki, Atushi Shibata, 2000 .

Oblique incidence scatterometry for 2D/3D isolation mounts with RCWA and PML

Hirokimi Shirasaki, 2016, SPIE Advanced Lithography.