Koji Kosaka

A Control Method of Ultrasonic Actuator-Driven Precision Stages Based on Stick-Slip Compensation and Continuous-Path Tracking

Kiyoshi Ohishi, Tadahiro Ohmi, Takeo Ishikawa, 2005 .

A Friction Compensation Method in Positioning Control of Nonresonant Ultrasonic Actuator-Driven Precise Stage

Kiyoshi Ohishi, Tadahiro Ohmi, Takeo Ishikawa, 2006 .

Variable Frequency Drive using nonresonant ultrasonic motor for wear reduction

Yuki Soh, Hiroshi Kubota, Koji Kosaka, 2010, 2010 International Symposium on Semiconductor Manufacturing (ISSM).

Adaptive Observer Based-Static Friction Compensation of Ultraprecision Stages for Next-Generation Semiconductor Exposure Equipment

Kiyoshi Ohishi, Tadahiro Ohmi, Takeo Ishikawa, 2005 .

VARIABLE FREQUENCY CONTROL FOR SPIDER-DRIVEN ULTRA-PRECISION STAGES

Kiyoshi Ohishi, Tadahiro Ohmi, Takeo Ishikawa, 2005 .

615 Fast Motion Control of a High Precision Stage using a Synchronous Piezoelectric Device Driver

Kiyoshi Ohishi, Truong Ngoc Minh, Seiji Hashimoto, 2005 .