Robert K. Messenger

FEEDBACK CONTROL OF A THERMOMECHANICAL INPLANE MICROACTUATOR USING PIEZORESISTIVE DISPLACEMENT SENSING

Timothy W. McLain, Larry L. Howell, Robert K. Messenger, 2004 .

Observations of Piezoresistivity for Polysilicon in Bending that are Unexplained by Linear Models

Timothy W. McLain, Larry L. Howell, Brian D. Jensen, 2008 .

Integrated Piezoresistive Sensing for Feedback Control of Compliant MEMS

Robert K. Messenger, 2007 .

Piezoresistive feedback for improving transient response of MEMS thermal actuators

Timothy W. McLain, Larry L. Howell, Robert K. Messenger, 2006, SPIE Smart Structures and Materials + Nondestructive Evaluation and Health Monitoring.

Piezoresistive feedback for decreased response time of MEMS thermal actuators

Timothy W. McLain, Larry L. Howell, Robert K. Messenger, 2006 .

Modeling and Control of Surface Micromachined Thermal Actuators

Robert K. Messenger, 2004 .

Piezoresistive Feedback Control of a MEMS Thermal Actuator

Robert K. Messenger, T. McLain, L. Howell, 2009, Journal of Microelectromechanical Systems.