José Alexandre Diniz

Silicon nitride deposited by electron cyclotron resonance plasma-enhanced chemical vapor deposititon for micromachining applications

Roberto R. Panepucci, Jacobus W. Swart, José Alexandre Diniz, 1998, Photonics West - Micro and Nano Fabricated Electromechanical and Optical Components.

Accelerated Publication: Electrical characterization and morphological properties of AlN films prepared by dc reactive magnetron sputtering

José Alexandre Diniz, J. F. Souza, J. A. Diniz, 2011 .

Metal gate work function tuning by Al incorporation in TiN

Harold Dekkers, S. De Gendt, S. Van Elshocht, 2014 .

Silicon nitride thin films deposited by electron cyclotron resonance plasma enhanced chemical vapor deposition for micromechanical system applications

Stanislav A. Moshkalev, José Alexandre Diniz, S. Moshkalev, 2008 .