James P. Rominger

发表

Seamless Stitching For Large Area Integrated Circuit Manufacturing

James P. Rominger, 1988, Advanced Lithography.

An Analysis Of Electron Beam Registration Capabilities By Electrical Measurement Methods

James P. Rominger, 1989, Advanced Lithography.

Application of a reduced area electrical test pattern to precise pattern registration measurements

James P. Rominger, 1991, Other Conferences.

1 TOWARDS A PRODUCTION WORTHY 0 . 13 μ m PROCESS USING ALTERNATING PHASE SHIFT MASKS

Martin Burkhardt, Stephan Sinkwitz, Gert-Jan Janssen, 1999 .