K. Hiller

发表

Thomas Otto, Thomas Gessner, Detlef Billep, 2010 .

Investigations during annealing of the interface in Si-Si bonded wafers by multiple internal transmission infrared spectroscopy

M. Friedrich, K. Hiller, C. Himcinschi, 2002, Proceedings. International Semiconductor Conference.

A micro-SPM head array with exchangeable cantilevers

A. Sorger, J. Mehner, S. Gao, 2012, Photonics Europe.

An active reference spring array for in-situ calibration of the normal spring constant of AFM cantilevers

Sai Gao, Susann Hahn, K. Hiller, 2015, Microtechnologies for the New Millennium.

A comb-drive scanning-head array for fast scanning-probe microscope measurements

A. Sorger, J. Mehner, S. Gao, 2011, Microtechnologies.

low-cost, fully intergrated liquid handling platform for protein assays

Janko Auerswald, Thomas Gessner, Thomas Otto, 2008 .

Keynote) Smart Systems for a Better Life

Thomas Otto, Thomas Gessner, K. Hiller, 2013 .

Integration aspects of a polymer based SPR biosensor with active micro optical and micro fluidic elements

Janko Auerswald, Helmut Knapp, Guy Voirin, 2007 .

Micromachined mid-infrared tunable Fabry-Perot filter

N. Neumann, S. Kurth, K. Hiller, 2005, The 13th International Conference on Solid-State Sensors, Actuators and Microsystems, 2005. Digest of Technical Papers. TRANSDUCERS '05..

A fast MEMS infrared microspectrometer for the measurement of hydrocarbon gases

N. Neumann, S. Kurth, K. Hiller, 2015, 2015 Transducers - 2015 18th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS).

Polymer lab-on-chip systems with integrated electrochemical pumps suitable for large-scale fabrication

T. Gessner, K. Hiller, T. Otto, 2007 .

Dual-band MEMS Fabry-Pérot filter with two movable reflectors for mid- and long-wave infrared microspectrometers

N. Neumann, T. Gessner, S. Kurth, 2011, 2011 16th International Solid-State Sensors, Actuators and Microsystems Conference.