Dong Duk Lee

A Neural Network Model of Optical Emission Spectroscopy During Tungsten Interconnect Etch Process

Chang Ju Choi, Yeo Song Seol, Byung Whan Kim, 1998 .

Use of neural networks to model low-temperature tungsten etch characteristics in high density SF6 plasma

Dong Duk Lee, Byungwhan Kim, C. Choi, 2000 .