Yasunori Goto

Accuracy improvement of 3D-profiling for HAR features using deep learning

Pushe Zhao, Wei Sun, Taku Ninomiya, 2020, Advanced Lithography.

High-voltage CD-SEM-based application to monitor 3D profile of high-aspect-ratio features

Wei Sun, Taku Ninomiya, Yasunori Goto, 2020 .