Lewis Stern

Creating nanohole arrays with the helium ion microscope

Bill Thompson, Mohan Ananth, David C. Ferranti, 2011, Defense + Commercial Sensing.

Device metrology with high-performance scanning ion beams

David C. Joy, Bill Ward, Lewis Stern, 2007, SPIE Advanced Lithography.

Techniques for improving material fidelity and contrast consistency in secondary electron mode helium ion microscope (HIM) imaging

William Thompson, Lewis Stern, Chuong Huynh, 2010, Scanning Microscopies.

Precise nanofabrication with multiple ion beams for advanced circuit edit

Huimeng Wu, Lewis Stern, David Ferranti, 2014, Microelectron. Reliab..

Helium Ion Microscopy: a New Technique for Semiconductor Metrology and Nanotechnology

Michael T. Postek, András E. Vladár, John A. Kramar, 2007 .

Focused helium and neon ion beam induced etching for advanced extreme ultraviolet lithography mask repair

Philip D. Rack, Lewis Stern, Gerd Duscher, 2014 .

The Helium Ion Microscope: A New Tool for Nanotechnology and Nanomanufacturing | NIST

Michael T. Postek, John A. Kramar, Andras Vladar, 2007 .

Helium Ion Secondary Electron Mode Microscopy For Interconnect Material Imaging

Shinichi Ogawa, Lewis Stern, John Notte, 2010 .