Michael P. Belyansky

Characterization and mitigation of overlay error on silicon wafers with nonuniform stress

Nelson Felix, Pradeep Vukkadala, Sathish Veeraraghavan, 2014, Advanced Lithography.

Atomic Layer Deposition of Sidewall Spacers: Process, Equipment and Integration Challenges in State-of-the-Art Logic Technologies

Yiping Yao, Xin Zhou, Richard A. Conti, 2014 .

Characterization of wafer geometry and overlay error on silicon wafers with nonuniform stress

Nelson Felix, Christopher P. Ausschnitt, Pradeep Vukkadala, 2013 .

Methods of producing plasma enhanced chemical vapor deposition silicon nitride thin films with high compressive and tensile stress

Ying Li, Anita Madan, Oleg Gluschenkov, 2008 .

Study of alternate hardmasks for extreme ultraviolet patterning

Nelson Felix, Scott Halle, Indira Seshadri, 2016 .