Jan Engelen

Standardisation of assistive devices and design for all solutions

Jan Engelen, 2007 .

Mask Effects on Resist Variability in Extreme Ultraviolet Lithography

John J. Biafore, Pei-Yang Yan, Roel Gronheid, 2013 .

Evidence of speckle in extreme-UV lithography.

Pei-Yang Yan, Roel Gronheid, Alessandro Vaglio Pret, 2012, Optics express.

Comparative radius of curvature measurement by non-contact Newton's rings

Luc Missotten, Jan Engelen, N Barakat, 1991 .