Xiangzhao Wang

发表

Weighted least-squares phase unwrapping algorithm based on derivative variance correlation map

Yuangang Lu, Xiangzhao Wang, Xuping Zhang, 2007 .

Relationship between shear ratio and reconstruction accuracy in lateral shearing interferometry

Xiangzhao Wang, Peng Li, Feng Tang, 2020 .

Two-modality laser diode interferometer for high-accuracy measurement of long-range absolute distance

Xiangzhao Wang, B. J. Wang, Zhongliang Li, 2010, International Symposium on Precision Engineering Measurement and Instrumentation.

Coma aberration measurement by lateral image displacements at different defocus positions

Dongqing Zhang, Xiangzhao Wang, Mingying Ma, 2006, International Symposium on Advanced Optical Manufacturing and Testing Technologies (AOMATT).

Measurements of refractive index and physical thickness using optical coherence tomography

Xiangzhao Wang, Zujie Fang, Weizai Zhang, 2000, Other Conferences.

A novel FOCAL technique based on BP-ANN

Dongqing Zhang, Xiangzhao Wang, Mingying Ma, 2006 .

Analytical analysis for impact of polarization aberration of projection lens on lithographic imaging quality

Sikun Li, Xiangzhao Wang, Lina Shen, 2015, Advanced Lithography.

Efficient source mask optimization using multipole source representation

Sikun Li, Xiangzhao Wang, Chaoxing Yang, 2014 .

Robust pixel-based source and mask optimization for inverse lithography

Sikun Li, Xiangzhao Wang, Yang Bu, 2013 .

Performance test of focusing optics based on the Hartmann principle

Dan Liu, Yan Yan, Huijie Huang, 2005, SPIE/COS Photonics Asia.

A new real-time surface profile measurement using a sinusoidal phase modulating interferometry

Guotian He, Xiangzhao Wang, Jianmin Hu, 2007, International Congress on High-Speed Imaging and Photonics.

Nonsubsampled contourlet transform method for optical fringe pattern analysis in profilometry and interferometry.

Osami Sasaki, Sikun Li, Xiangzhao Wang, 2016, Applied optics.

Fast model for mask spectrum simulation and analysis of mask shadowing effects in extreme ultraviolet lithography

Xiaolei Liu, Sikun Li, Andreas Erdmann, 2014 .

Predictor of thermal aberrations via particle filter for online compensation

Sikun Li, Xiangzhao Wang, Weijie Shi, 2019 .

Critical pattern selection method for full-chip source and mask optimization.

Yayi Wei, Sikun Li, Xiangzhao Wang, 2020, Optics express.

Source mask optimization using the covariance matrix adaptation evolution strategy.

Xiangzhao Wang, Sikun Li, Guodong Chen, 2020, Optics express.

Pixel-based mask optimization via particle swarm optimization algorithm for inverse lithography

Lei Wang, Sikun Li, Xiangzhao Wang, 2016, Advanced Lithography.

Towards gamma-effect elimination in phase measurement profilometry

Sikun Li, Xiangzhao Wang, Abel Kamagara, 2018, Optik.

Optimal defocus selection based on normed Fourier transform for digital fringe pattern profilometry.

Sikun Li, Xiangzhao Wang, Abel Kamagara, 2017, Applied optics.

A new high-speed image sensing technique based on an ordinary CCD

Guotian He, Xiangzhao Wang, Jianmin Hu, 2007, International Congress on High-Speed Imaging and Photonics.

Full-range Fourier domain polarization-sensitive optical coherence tomography using sinusoidal phase modulation

Xin Guo, Yan Chen, Xiangzhao Wang, 2014, Other Conferences.

A new quality map for quality-guided phase unwrapping

Guotian He, Yuangang Lu, Xiangzhao Wang, 2004 .

Sparse and adaptive fringe-enhancement efficiency analysis in 3D optical digital fringe-projection imaging

Sikun Li, Xiangzhao Wang, Abel Kamagara, 2018, International Conference on Digital Image Processing.

Modeling and optimization of lens heating effect for lithographic projector

Sikun Li, Xiangzhao Wang, Lifeng Duan, 2018 .

Calibration method of overlay measurement error caused by asymmetric mark.

Xiangzhao Wang, Fengzhao Dai, Yang Bu, 2018, Applied optics.

Parameter optimization of optically excited microresonator by a semiconductor laser subject to optical feedback

Hua Wang, Xiangzhao Wang, Bingjie Huang, 2007, International Symposium on Advanced Optical Manufacturing and Testing Technologies (AOMATT).

Coma measurement by transmission image sensor with a PSM

Jianming Hu, Dongqing Zhang, Xiangzhao Wang, 2005, SPIE/COS Photonics Asia.

High-speed full range complex Fourier-domain optical coherence tomography using sinusoidal phase-modulating interferometry

Xiangzhao Wang, Peng Bu, Osami Sasaki, 2007, SPIE/COS Photonics Asia.

Micromirror array allocation algorithm based on deconvolution.

Sikun Li, Jianhua Zhang, Gang Sun, 2020, Applied optics.

All-fiber sinusoidal phase-modulating laser diode interferometer insensitive to the intensity change of the light source

Xiangzhao Wang, Gaoting Chen, Caini Zhang, 2001, Other Conferences.

High-order aberration measurement technique based on a quadratic Zernike model with optimized source

Sikun Li, Anatoly Bourov, Andreas Erdmann, 2013 .

Extended AMAI-PCA technique based on multi-level Box–Behnken design

Sikun Li, Anatoly Bourov, Xiangzhao Wang, 2013 .

A new method to determine the energy range for the FOCAL technique

Dongqing Zhang, Xiangzhao Wang, Liping Guo, 2005, SPIE/COS Photonics Asia.

Phase unwrapping with regularized phase-tracking technique based on simulated annealing algorithm

Feng Qian, Xiangzhao Wang, Xianghong Zhong, 2003 .

A high-accuracy subaperture stitching system for nonflatness measurement of wafer stage mirror

Xiangzhao Wang, Feng Tang, Fengzhao Dai, 2014, Photonics Asia.

Three-dimensional full-range complex Fourier domain optical coherence tomography for in-vivo volumetric imaging of human skin

Xin Guo, Xiangzhao Wang, Peng Bu, 2012, Photonics and Optoelectronics Meetings.

Adaptive filter for unwrapping noisy phase image in phase-stepping interferometry

Feng Qian, Xiangzhao Wang, Xuefeng Wang, 2001 .

In situ aberration measurement method using a phase-shift ring mask

Sikun Li, Andreas Erdmann, Xiangzhao Wang, 2014, Advanced Lithography.

A method for improving the measurement accuracy of lateral shearing interferometry

Jing Yuan, Jie Li, Bo Chen, 2018, International Conference on Optical Instruments and Technology.

Practical application of aerial image by principal component analysis to measure wavefront aberration of lithographic lens

Anatoly Bourov, Xiangzhao Wang, Lifeng Duan, 2012 .

Fast optimization of defect compensation and optical proximity correction for extreme ultraviolet lithography mask

Wei Cheng, Sikun Li, Xiangzhao Wang, 2019 .

Three-dimensional information security combined fringe projection with double random phase encoding

Sikun Li, Xiangzhao Wang, Yong-Liang Xiao, 2013 .

Symmetric polarization aberration compensation method based on scalar aberration control for lithographic projection lens

Sikun Li, Xiangzhao Wang, Peng Bu, 2012, Advanced Lithography.

Fiber Bragg grating sensor for the measurement of elevated temperature

Hong He, Yage Zhan, Xiangzhao Wang, 2005, SPIE/COS Photonics Asia.

FFT wavefront reconstruction algorithm with periodical extension for lateral shearing interferometry

Xiangzhao Wang, Peng Li, Feng Tang, 2020, SPIE/COS Photonics Asia.

Method for measuring the lateral aberrations of a lithographic projection system with mirror-symmetric FOCAL marks

Osami Sasaki, Dongqing Zhang, Xiangzhao Wang, 2006 .

The thermal aberration analysis of a lithography projection lens

Sikun Li, Jian Wang, Xiangzhao Wang, 2017, Advanced Lithography.

Exposure dose control for step-and-scan lithography

Dongqing Zhang, Xiangzhao Wang, Liping Guo, 2005, SPIE/COS Photonics Asia.

Optimization of defect compensation for extreme ultraviolet lithography mask by covariance-matrix-adaption evolution strategy

Wei Cheng, Sikun Li, Chaoxing Yang, 2018 .

In situ aberration measurement technique based on quadratic Zernike model

Sikun Li, Anatoly Bourov, Andreas Erdmann, 2012, Optical Systems Design.

Fast rigorous model for mask spectrum simulation and analysis of mask shadowing effects in EUV lithography

Xiaolei Liu, Sikun Li, Andreas Erdmann, 2014, Advanced Lithography.

Method for eliminating the influence of light intensity modulation in sinusoidal phase modulating laser diode interferometer

Xiangzhao Wang, Defeng Zheng, Zhongliang Li, 2007, International Symposium on Advanced Optical Manufacturing and Testing Technologies (AOMATT).

Speckle reduction in optical coherence tomography by two-step image registration

Hang Zhang, Xiangzhao Wang, Zhongliang Li, 2015, Journal of biomedical optics.

Radial period extraction method employing frequency measurement for quantitative collimation testing

Sikun Li, Xiangzhao Wang, Xiang-zhao Wang, 2016 .

Digital sinusoidal fringe generation with defocusing for profilometry: exponential binary vs squared binary patterns

Sikun Li, Xiangzhao Wang, Abel Kamagara, 2018, SPIE/COS Photonics Asia.

A unidirectional multiwavelength erbium-doped fiber ring laser without isolator at room temperature

Jing Yang, Xiangzhao Wang, Guoyong Sun, 2005, SPIE/OSA/IEEE Asia Communications and Photonics.

Analytical model for EUV mask diffraction field calculation

Andreas Erdmann, Xiangzhao Wang, Peng Bu, 2011, Optical Systems Design.

Application of BP-neural networks in the FOCAL technique

Dongqing Zhang, Xiangzhao Wang, Mingying Ma, 2005, SPIE/COS Photonics Asia.

A novel method for measuring the coma aberration of lithographic projection optics by relative image displacements at multiple illumination settings

Xiangzhao Wang, Fan Wang, Mingying Ma, 2007, SPIE/COS Photonics Asia.

Phase unwrapping based on branch cut placing and reliability ordering

Guotian He, Yuangang Lu, Xiangzhao Wang, 2005 .

Novel algorithm for modeling aberration-induced overlay in lithographic process

Fan Wang, Xiangzhao Wang, Mingying Ma, 2007, International Symposium on Advanced Optical Manufacturing and Testing Technologies (AOMATT).

Method for improving measurement efficiency of lateral shearing interferometry

Feng Tang, Jie Li, Xiangzhao Wang, 2017 .

Modal wavefront reconstruction based on Zernike polynomials for lateral shearing interferometry: comparisons of existing algorithms.

Osami Sasaki, Xiangzhao Wang, Peng Feng, 2012, Applied optics.

A Simple Optical Reader for Upconverting Phosphor Particles Captured on Lateral Flow Strip

Aijun Zeng, Xiangzhao Wang, Youbao Zhang, 2009, IEEE Sensors Journal.

Nonlinear gamma correction via normed bicoherence minimization in optical fringe projection metrology

Sikun Li, Xiangzhao Wang, Abel Kamagara, 2018 .

In situ aberration measurement technique based on an aerial image with an optimized source

Sikun Li, Anatoly Bourov, Andreas Erdmann, 2013 .

Scattering performance analysis of reflectance photometer for quantifying gold labeled test strips

Huijie Huang, Xiangzhao Wang, Lihua Huang, 2008, International Conference on Optical Instruments and Technology.

Detailed operation procedure of three polarized Monte Carlo programs and compulsory optimizations

Xin Cheng, Feng Tang, Xiangzhao Wang, 2009, Photonics and Optoelectronics Meetings.

Defect parameters retrieval based on optical projection images

Sikun Li, Andreas Erdmann, Xiangzhao Wang, 2013, Optical Metrology.

Sinusoidal phase-modulating Fizeau interferometer using phase-conjugate wave

Takamasa Suzuki, Xiangzhao Wang, Osami Sasaki, 1993, Optics & Photonics.

UPT-based biosensor and its application

Huijie Huang, Xiangzhao Wang, Lei Zhou, 2005, SPIE/COS Photonics Asia.

Method for measuring the granite surface topography of wafer stage with laser interferometer

Jianming Hu, Xiangzhao Wang, Weijie Shi, 2006, International Symposium on Advanced Optical Manufacturing and Testing Technologies (AOMATT).

Pixelated source optimization for optical lithography via particle swarm optimization

Sikun Li, Xiangzhao Wang, Lei Wang, 2016 .

Source optimization using particle swarm optimization algorithm in photolithography

Sikun Li, Xiangzhao Wang, Lei Wang, 2015, Advanced Lithography.

Novel method for measuring axial aberrations of projection optics for lithographic tools

Xiangzhao Wang, Mingying Ma, Fan Wang, 2007, International Symposium on Advanced Optical Manufacturing and Testing Technologies (AOMATT).

In situ aberration measurement technique based on aerial image with optimized source

Sikun Li, Anatoly Bourov, Andreas Erdmann, 2012, Optical Systems Design.

Adaptive denoising method to improve aberration measurement performance

Sikun Li, Anatoly Bourov, Andreas Erdmann, 2013 .

Phase-shifting profilometer for measurement of the physical parameters of the fiber connector endface

Feng Qian, Xiangzhao Wang, Xuefeng Wang, 2001, Other Conferences.

A defocus measurement method for an in situ aberration measurement method using a phase-shift ring mask

Sikun Li, Andreas Erdmann, Xiangzhao Wang, 2014, Advanced Lithography.

In situ aberration measurement method using a phase-shift ring mask

Sikun Li, Xiangzhao Wang, Lifeng Duan, 2014 .

Calibration of system errors in lateral shearing interferometer for EUV-wavefront metrology

Jie Li, Xiangzhao Wang, Fengzhao Dai, 2015, Advanced Lithography.

Simulated annealing algorithm for unwrapping noisy phase map

Feng Qian, Xiangzhao Wang, Xianghong Zhong, 2002, SPIE/COS Photonics Asia.

Source mask optimization using real-coded genetic algorithms

Sikun Li, Andreas Erdmann, Xiangzhao Wang, 2013, Advanced Lithography.

Unwrapping phase map by estimating regions containing phase jumps

Xiangzhao Wang, Xuefeng Wang, Feng Qian, 2002, SPIE/COS Photonics Asia.

A novel method for speckle reduction in optical coherence tomography by image registration

Hang Zhang, Xuan Wang, Xiangzhao Wang, 2014, Other Conferences.

Analytical analysis of the impact of polarization aberration of projection lens on lithographic imaging

Sikun Li, Xiangzhao Wang, Lina Shen, 2015 .

Experimental determination of aberration in lithographic lens by aerial image

Anatoly Bourov, Xiangzhao Wang, Lifeng Duan, 2011, Optical Systems Design.

Jones pupil metrology of lithographic projection lens and its optimal configuration in the presence of error sources.

Sikun Li, Jian Wang, Chaoxing Yang, 2019, Optics express.

In situ aberration measurement technique based on principal component analysis of aerial image.

Bo Peng, Xiangzhao Wang, Peng Bu, 2011, Optics express.

Displacement measurement based on moire technique and polarization modulation

Aijun Zeng, Xiangzhao Wang, Lihua Huang, 2005, SPIE/COS Photonics Asia.

New parallel plate interferometer for measuring angular displacement

Osami Sasaki, Xiangzhao Wang, Defeng Zheng, 2007, International Symposium on Advanced Optical Manufacturing and Testing Technologies (AOMATT).