G. L. Varnell

E-Beam Writing Techniques for Semiconductor Device Fabrication

G. L. Varnell, D. F. Spicer, A. C. Rodger, 1973 .

Sixteenth Symposium on Electron, Ion, and Photon Beam Technology , Dallas, Texas, May 26-29, 1981 : Abstracts

D. R. Herriott, G. L. Varnell, 1981 .

Fabrication of integrated injection logic using e‐beam lithography

G. L. Varnell, J. L. Bartelt, Stephen A. Evans, 1978 .