Angela Guerry

Implementation of Reference Measurement System using CD-AFM

Marylyn Hoy Bennett, Ronald G. Dixson, Theodore V. Vorburger, 2003, SPIE Advanced Lithography.

Implementation of a Reference Measurement System Using CD-AFM | NIST

Marylyn Hoy Bennett, Theodore V. Vorburger, Ronald G. Dixson, 2003 .

Toward traceability for at-line AFM dimensional metrology

Michael T. Postek, Theodore V. Vorburger, Ronald G. Dixson, 2002, SPIE Advanced Lithography.

Reference metrology using a next-generation CD-AFM

Ronald G. Dixson, Angela Guerry, 2004, SPIE Advanced Lithography.

Fin Sidewall Microroughness Measurement by AFM

Tsu-Jae King, Weize Xiong, Carolyn F. H. Gondran, 2004 .