Sylvia E. Gebhardt

Thermomechanical design, hybrid fabrication, and testing of a MOEMS deformable mirror

Andreas Tünnermann, Ramona Eberhardt, Erik Beckert, 2013 .

Fabrication and characterization of a monolithic piezoelectric actuator for fiber coupling

Andreas Tünnermann, Peter Schreiber, Ramona Eberhardt, 2008 .

Novel construction of a deformable mirror for laser beam shaping

Andreas Tünnermann, Ramona Eberhardt, Sylvia E. Gebhardt, 2009, MOEMS-MEMS.

Application of PZT thick-films on adjusting purposes in micro-optical systems

Andreas Tünnermann, Peter Schreiber, Ramona Eberhardt, 2007, SPIE Microtechnologies.