J. Blue

Recipe-independent Tool Health Indicator and Fault Prognosis

Argon Chen, Tze-Chin Chou, J. Blue, 2006, 2006 IEEE International Symposium on Semiconductor Manufacturing.

Efficient FDC based on hierarchical tool condition monitoring scheme

J. Pinaton, A. Roussy, J. Blue, 2012, 2012 SEMI Advanced Semiconductor Manufacturing Conference.

Tool Condition Diagnosis With a Recipe-Independent Hierarchical Monitoring Scheme

A. Roussy, J. Blue, D. Gleispach, 2013, IEEE Transactions on Semiconductor Manufacturing.

Recipe-Independent Indicator for Tool Health Diagnosis and Predictive Maintenance

J. Blue, A. Chen, J. Blue, 2009, IEEE Transactions on Semiconductor Manufacturing.