Marko Vogler

Inkjetable and photo-curable resists for large-area and high-throughput roll-to-roll nanoimprint lithography

Mathias Rommel, Florian Schlachter, Dieter Nees, 2014 .

Low-viscosity and fast-curing polymer system for UV-based nanoimprint lithography and its processing

Markus Bender, Andreas Fuchs, Marko Vogler, 2007, SPIE Advanced Lithography.

Enabling large area and high throughput roll-to-roll NIL by novel inkjetable and photo-curable NIL resists

Mathias Rommel, Florian Schlachter, Dieter Nees, 2014, Advanced Lithography.

A Moiré method for high accuracy alignment in nanoimprint lithography

Ernst-Bernhard Kley, Thomas Glinsner, Kurt Hingerl, 2007 .

Direct UV-Imprinting of Hybrid-Polymer Photonic Microring Resonators and Their Characterization

Rene Landgraf, Robert Kirchner, Wolf-Joachim Fischer, 2014, Journal of Lightwave Technology.

Innovative and Tailor-made Resist and Working Stamp Materials for Advancing NIL-based Production Technology

Gabi Gruetzner, Helmut Schift, Marko Vogler, 2013 .

Combining nanoimprint lithography and a molecular weight selective thermal reflow for the generation of mixed 3D structures

Helmut Schift, Marko Vogler, Arne Schleunitz, 2011 .